The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
May. 27, 2000
Robert H. Stark, Norfolk, VA (US);
Karl H. Schoenbach, Norfolk, VA (US);
Old Dominion University, Norfolk, VA (US);
Abstract
This invention improves the stability and control of high-pressure glow discharges by means of a microhllow cathode discharge. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with an opening formed in the electrodes, serves as a plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this invention resembles that of a vacuum triode. Using the microhollow cathode discharge as a plasma cathode, stable, dc discharges in argon up to atmospheric pressures can be generated. Additionally, parallel operation of these discharges allows for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges. Thus, this invention allows simultaneous generation of relatively high electron densities at relatively low temperatures with stable, direct current, homogenous glow discharge plasma at relatively high pressure.