The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2002

Filed:

Jul. 24, 2000
Applicant:
Inventors:

H. Paul Maruska, Winter Springs, FL (US);

Stephen N. Bunker, Wakefield, MA (US);

Assignee:

Implant Sciences Corporation, Wakefield, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/18222 ;
U.S. Cl.
CPC ...
H01L 2/18222 ;
Abstract

The present invention comprises methods for producing semiconductor devices useful in high temperature applications. The invention is based on using silicon ion implantation to convert a portion of the p-type base layer of magnesium-doped GaN into n-type GaN. The boundary of the n-type GaN within the p-type layer then becomes an n-p diode junction which can function as the emitter-base junction. The present methods utilize ion implantation to convert a portion of the p-type layer to n-type thereby forming an n-p junction having desirable diode characteristics. The invention also includes BJT and HBT devices incorporating the present implanted n-p diode junctions.


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