The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Mar. 16, 2000
Applicant:
Inventors:
Satoshi Sasaki, Miyagi, JP;
Shoji Terada, Miyagi, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/04 ;
U.S. Cl.
CPC ...
C23F 1/04 ;
Abstract
The track width of the upper layer pole of a thin film magnetic head is formed with an enhanced level of precision. A plating underlay film is formed on a sixth non-magnetic layer and then an upper layer pole is formed thereon by means of a frame plating technique. Then, a first resist film is formed on one of the opposite lateral sides of the upper layer pole and an etching operation is conducted on the upper layer pole . Thereafter, the first resist film is removed and a second resist film is formed on the other lateral side and a similar etching operation is conducted on the upper layer pole