The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Oct. 05, 2001
Applicant:
Inventors:
Assignee:
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 ;
U.S. Cl.
CPC ...
G02B 7/182 ;
Abstract
The micro-mirror apparatus of the invention has; a mirror , a plurality of torsion springs for supporting the mirror so as to be tiltable relative to an upper substrate , a lower substrate arranged facing a lower face of the mirror , a convex portion provided on an upper face of the lower substrate and a plurality of lower electrodes formed on an outer face of the convex portion . For the torsion spring , an aspect ratio of height/width in a cross-section perpendicular to a longitudinal direction thereof is at least 1.8.