The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Aug. 08, 2000
Applicant:
Inventor:
Michel Puech, Metz Tessy, FR;
Assignee:
Alcatel, Paris, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/6507 ; C23C 1/6505 ;
U.S. Cl.
CPC ...
C23C 1/6507 ; C23C 1/6505 ;
Abstract
In a process for treatment of a substrate placed in a vacuum enclosure, the invention provides for compensating any variation of the active gas supply flowrate through an active gas supply pipe by injecting a complementary flowrate of control gas into an area near controlled gas aspiration means. This circumvents the inability of pressure control systems and impedance matching systems to respond in times of the order of one second to variations of the input active gas flowrate.