The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Mar. 08, 1999
Applicant:
Inventors:
Paul J. Steffan, Elk Grove, CA (US);
Allen S. Yu, Fremont, CA (US);
Assignee:
Advanced Micro Devices, INC, Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/730 ;
U.S. Cl.
CPC ...
G06F 1/730 ;
Abstract
A scan tool recipe management database system for recipes utilized in the scanning of semiconductor wafers during the manufacture of the semiconductor wafers. The scan tool recipe management database system includes workstations at each scan tool for simultaneously inputting recipes and changes to the recipes to the scan tool and to a scan tool recipe database.