The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Sep. 21, 2000
Applicant:
Inventors:
Butrus T. Khuri-Yakub, Palo Alto, CA (US);
F. Levent Degertekin, Millbrae, CA (US);
Sam Calmes, Mountain View, CA (US);
Xuecheng Jin, Stanford, CA (US);
Assignee:
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 1/900 ;
U.S. Cl.
CPC ...
H04R 1/900 ;
Abstract
There is described a cMUT array with transducer elements which include a plurality of cells with membranes formed on one surface of a wafer. Voltages applied between said spaced electrodes drive said membranes. The voltages applied to said electrodes are applied from the opposite surface of the wafer through the wafer and through vias formed in the wafer.