The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2002

Filed:

Mar. 30, 1999
Applicant:
Inventor:

Ulrich Zimmermann, Mechanicsville, VA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/976 ; H01L 2/994 ; H01L 3/1062 ; H01L 3/1113 ; H01L 3/1119 ;
U.S. Cl.
CPC ...
H01L 2/976 ; H01L 2/994 ; H01L 3/1062 ; H01L 3/1113 ; H01L 3/1119 ;
Abstract

A semiconductor read-only memory (ROM) has trenches and vertical transistors. The trenches are filled with insulator material during the manufacturing process. Holes, which are as wide as the trenches are etched into the insulator at regions where word lines and decoder lines are to be provided over the trenches in a later manufacturing step. In a subsequent masking process for changing the conductivity characteristic of channel regions of transistors, channel regions selected according to programming requirements, are doped. The insulator remaining in the trenches prevents that regions under the insulator material are affected by the masking method.


Find Patent Forward Citations

Zimmermann, Ulrich. (2002). Semiconductor read-only memory and method of manufacturing the same (U.S. Patent No. 6429494). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6429494

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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