The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2002

Filed:

Jul. 30, 1996
Applicant:
Inventors:

John Edward Cronin, Milton, VT (US);

Carter Welling Kaanta, Colchester, VT (US);

Brian John Machesney, Burlington, VT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/7108 ; H01L 2/976 ; H01L 2/994 ; H01L 3/1119 ;
U.S. Cl.
CPC ...
H01L 2/7108 ; H01L 2/976 ; H01L 2/994 ; H01L 3/1119 ;
Abstract

A semiconductor chip with uniform topology includes a memory cell having a stacked capacitor self-aligned with a bitline. Thick insulation on the bitline and on interconnect wiring on supports circuits of the chip serves to provide the uniform topology and to provide for the self-alignment of the capacitor and bitline. Bitlines and support circuit interconnect wiring are both formed from the same level of metal but they are patterned in separate masking steps. The stacked capacitors are separated from each other by less than the minimum dimension of the photolithographic system used for fabrication.


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