The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Sep. 27, 1996
Hirokazu Sekine, Fujisawa, JP;
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A solid-state imaging device provided with color filter in which process margin with respect to color reproducibility at the time of production is increased. This solid-state imaging device includes a semiconductor substrate, light shielding films formed so as to define light opening portions by material of light shielding characteristic above the semiconductor substrate, and color filters formed, in a manner to correspond to the light opening portions, above the light shielding films so that respective end portions thereof are correspondingly positioned within the regions where the light shielding films are respectively formed. In addition, a method of manufacturing such a solid-state imaging device, has the steps of forming a first insulating film on a semiconductor substrate, allowing light shielding material to selectively remain within regions where light shielding films are to be respectively formed on the first insulating film to form the light shielding films, forming a second insulating film in this state, and selectively forming a color filter layer on the second insulating film so as to cover the opening portion surrounded by the light shielding films and to allow the respective end portions to be positioned on the regions where the light shielding films are respectively formed to repeat the above-mentioned process steps to produce solid-state imaging device provided with, e.g., color filters of three colors.