The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Dec. 29, 2000
John E. Pillion, Brookline, NH (US);
Michael E. Clarke, Chelmsford, MA (US);
Jill Boski, Northampton, MA (US);
Mykrolis Corporation, Billerica, MA (US);
Abstract
A process for coating a solid surface ( ) with a conditioned liquid composition of substantially uniform thickness is provided. A liquid composition is conditioned by a) degassing either via vacuum or by sparging with a high kinematic viscosity gas; and b) substantially maintaining the viscosity of the liquid composition. The conditioned liquid may then be dispensed onto a solid surface ( ) positioned in a sub-atmospheric environment ( ) or in a helium-rich environment ( ). The solid surface ( ) is rotated so that the liquid composition forms a uniformly thick coating free from bubbles on the solid surface ( ) and thereby produces a thin film of uniform thickness.