The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Feb. 21, 2000
Applicant:
Inventor:
Mark Andrew Stocker, East Hunsburg, GB;
Assignee:
Unova U.K. Limited, Aylesbury, GB;
Primary Examiner:
Int. Cl.
CPC ...
B24B 9/06 ;
U.S. Cl.
CPC ...
B24B 9/06 ;
Abstract
A semi-conductor wafer ( ) has its inclined edge flanks polished by a grooved wheel ( ) of synthetic plastics material, while a jet ( ) of polishing slurry, which may comprise colloidal silica, is fed downwards into the zone of contact between the wheel and the wafer. The wheel ( ) is preferably rocked or oscillated laterally such that a constant polishing force is alternatively applied to each flank of the wafer ( ). The wheel may be mounted in a buffer store to which the wafers are transported from a grinding station which grinds the edge flanks.