The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Jan. 04, 1999
Masahiro Aoki, Tokyo, JP;
Chikara Abe, Hachioji, JP;
Olympus Optical Co., Ltd., Tokyo, JP;
Abstract
A height measuring apparatus characterized by having an illumination optical system for illuminating the surface of an object, a pair of imaging optical systems having optical axis arranged symmetrical with respect to the optical axis of all light beam reflected by the object and designed to converging a part of the light beam along the optical axes, a pair of light-detecting optical systems arranged in a converging plane of the imaging optical systems and designed to detect light spots which change in position in accordance with the height of the object, and height calculator for generating spot-position signals from the light-intensity signals supplied from the light-detecting optical systems and calculating the height of the surface of the object from the spot-position signals.