The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Oct. 21, 1999
Applicant:
Inventor:
Kevin Cyrus Robinson, Lehigh, PA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/33 ;
U.S. Cl.
CPC ...
G02F 1/33 ;
Abstract
Fabry-Perot filters are disclosed. having micro-electro-mechanical systems (MEMS) parts operable for tuning of the filters. The filters of the present invention are particularly useful in WDM and DWDM optical communication systems for multiplexing and demultiplexing channels of electromagnetically-carried data traversing the system. The filter can be miniaturized by etching or photolithographing the filter on silicon wafers utilizing MEMS technology. A MEMS device fabricated on the wafer is operative for moving a variably positioned mirror to change the length of the cavity or etalon of the Fabry-Perot filter, thereby tuning the filter to multiplex or demultiplex the channels.