The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Jul. 01, 1999
Yuji Kosugi, Utsunomiya, JP;
Yuichi Yamada, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A position detection device for detecting position information of a photosensitive substrate when performing projection exposure of a pattern on a surface of an object onto the photosensitive substrate, via a projection optical system, by scanning the pattern includes a device for detecting the position information within a shot region of the photosensitive substrate in the projection optical system, and a device for causing the detection device to detect the position information at a plurality of points arranged so that a first end of the plurality of points coincides with a position to start a scanning exposure and a second end of the plurality of points coincides with a position to end the scanning exposure, in accordance with a size of the shot region.