The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Sep. 30, 1999
Applicant:
Inventor:
Hans Wilfried Peter Koops, Ober-Ramstadt, DE;
Assignee:
Deutsche Telekom AG, Bonn, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/700 ; G01R 1/067 ; G01B 7/34 ;
U.S. Cl.
CPC ...
H01J 3/700 ; G01R 1/067 ; G01B 7/34 ;
Abstract
In a test head for a scanning probe microscope for the contactless testing of integrated electronic circuits, a group of probes produced by three-dimensional additive lithography is disposed on a substrate. The probes are directed at a point situated centrally above the group of probes. The conducting probes as well as the base end of the capacitive probe are joined to printed circuit trace structures on the substrate for connection to a test circuit.
Koops, Hans Wilfried Peter. (2002). Multi-probe test head and process using same (U.S. Patent No. 6426499). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6426499
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile