The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Jun. 09, 1999
Applicant:
Inventors:
Stephen Kudelka, Fishkill, NY (US);
Alexander Michaelis, Wappingers Falls, NY (US);
Dirk Tobben, Langebrueek, DE;
Assignee:
Infineon Technologies AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
In accordance with the present invention, a method for expanding trenches includes the steps of forming a trench in a substrate, preparing surfaces withIn the trench by etching the surfaces with a wet etchant to provide a hydrogen terminated silicon surface and anisoropically wet etching the trench to expand the trench.