The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Jul. 31, 2000
Applicant:
Inventors:
Bishnu P. Gogoi, Scottsdale, AZ (US);
David J. Monk, Mesa, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A semiconductor component comprises a substrate ( ), a two flexible pressure sensor diaphragms ( ) supported by the substrate ( ), and a fixed electrode ( ) between the two diaphragms ( ). The two diaphragms ( ) and the fixed electrode ( ) are electrodes of two differential capacitors. The substrate ( ) has a hole (601) extending from one surface ( ) of the substrate ( ) to an opposite surface ( ) of the substrate ( ). The hole ( ) is located underneath the two diaphragms ( ), and the hole ( ) at the opposite surfaces ( ) of the substrate ( ) is preferably larger than the hole ( ) at an interior portion of the substrate ( ).