The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Sep. 20, 2001
Ken Kawamata, Hachioji, JP;
Nobuaki Mitamura, Hachioji, JP;
Olympus Optical Co., Ltd., , JP;
Abstract
A substrate is autorotatably installed in a vacuum chamber at an upper part thereof. MgF granules as a film source material are put in a quartz boat and mounted on a magnetron cathode . The magnetron cathode is connected through a matching box to a 13.56 MHz radio frequency power source . Cooling water for holding the temperature of the magnetron cathode constant flows on a lower face of the magnetron cathode . A side face of the vacuum chamber is provided with gas introduction ports for introducing gas in the vacuum chamber . A shutter is placed between the magetron cathode and the substrate . This structure provides a process enabling forming a thin film at a high speed by sputtering, especially, a high speed sputtering enabling forming a thin fluoride film free of light absorption.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile