The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Jun. 04, 1999
Munemitsu Abe, Miyagi-ken, JP;
Masayoshi Esashi, Tokyo, JP;
Other;
Abstract
In a microactuator, a fixed substrate and a movable substrate are placed to be spaced opposed to each other. Between these substrates, a plurality of actuators are arranged to provide different moving distances. The actuators include comb-like movable electrodes formed on the movable substrate, and fixed electrodes formed on the fixed substrate, and having a plurality of teeth that extend outside the leading ends of the teeth of the movable electrodes in an undriven state. The movable substrate is allowed to move so that the leading ends of the teeth of the movable electrodes reach the outer ends of the teeth of the fixed electrodes. The portions of the fixed electrode teeth, which extend outside the movable electrode teeth, are different in length among the actuators.