The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
May. 12, 2000
Applicant:
Inventors:
Shunichi Shido, Zama, JP;
Takeaki Itsuji, Atsugi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 7/00 ;
U.S. Cl.
CPC ...
G21K 7/00 ;
Abstract
A detection apparatus for detecting the surface of a specimen by means of a cantilever having a probe and a piezo resistance element, which comprises a first circuit for detecting an electric current flowing through the piezo resistance element and a second circuit for detecting an electric current flowing through the probe. The electric current flowing through the piezo resistance element and the electric current flowing through the probe are detected by way of a common current path.