The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Oct. 22, 1999
Applicant:
Inventor:
Gary C. Ettinger, Los Altos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 1/00 ;
U.S. Cl.
CPC ...
B24B 1/00 ;
Abstract
A polishing pad is adhered to a platen by a heat activated adhesive. Means are provided to heat the adhesive to a temperature sufficient to soften the adhesive, thereby facilitating removal of the polishing pad from the platen. Embodiments include employing a heat softenable adhesive that preferentially adheres to the polishing pad upon removal of the polishing pad from the platen.