The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Dec. 02, 1998
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Abstract
On a semiconductor wafer, recognition marks are fabricated on the crossing points of scribe lines for the purpose of proper wafer alignment in wafer sawing process. Since the recognition mark has a distinctive pattern that is distinguished from other circuit patterns on the chip, the recognition mark can be easily recognized by a camera in a sawing apparatus, and reduce the chance of wafer misaligning. When a part of circuit pattern on the semiconductor chip is used for the alignment purpose, the chance of wafer misalignment relatively high due to the similarity between the part chosen and other parts of the circuit pattern. The present invention also provides a method for sawing the wafer using the recognition marks.