The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Jul. 12, 2001
James Garcia, Austin, TX (US);
Michael McBride, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
In accordance with the present invention, a method is provided for measuring contaminant mobile ions in a dielectric portion of a semiconductor. The method is comprised of elevating a temperature of the dielectric portion of the semiconductor and exposing the dielectric portion of the semiconductor to a mobilizing fluid having contaminant releasing atoms that assist in mobilizing the contaminant mobile ions within the dielectric portion of the semiconductor. After elevating the temperature of the dielectric portion and exposing the dielectric portion to mobilizing fluid, the contaminant mobile ions within the dielectric portion of the semiconductor are measured according to the present invention.