The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2002

Filed:

Apr. 20, 2000
Applicant:
Inventors:

Han-Shin Ho, Hsinchu Hsien, TW;

Wei-Hai Lai, Hsinchu, TW;

Chien-Shuan Kuo, Hsinchu Hsien, TW;

Deng-Tswen Shieh, Kaohsiung, TW;

Wen-Cheng Hsu, Hsinchu Hsien, TW;

Wea-Fun Fan, Hsinchu Hsien, TW;

Hann-Tsong Wang, Hsinchu Hsien, TW;

Yuh-Feng Chen, Tainan Hsien, TW;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract

A membrane probe card is provided. The membrane probe card includes a pressure mechanism having an upper-housing and a support block. The support block has a spring system for providing a distance of travel to the support block. A printed circuit board is coupled to the pressure mechanism for providing electrical connection to a test apparatus. A membrane assembly is coupled to the pads on a wafer for providing electric connection to the printed circuit board. The membrane assembly is a replaceable and modularized component for application to integrated circuits with various layouts and dimensions.


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