The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Mar. 02, 2000
Hong Qiu, Beijing, CN;
Koji Sumi, Nagano, JP;
Tsutomu Nishiwaki, Nagano, JP;
Haruo Nakamura, Tokyo, JP;
Seiko Epson Corporation, , JP;
Abstract
A piezoelectric actuator, comprising a stacked structure consisting of a top electrode , a piezoelectric film , and a bottom electrode , wherein the piezoelectric film comprises a first group of piezoelectric ceramic particles and a second group of piezoelectric ceramic particles. A distinctive feature is that the particles constituting the first group of piezoelectric ceramic particles are larger than the jingo particles constituting the second group of piezoelectric ceramic particles, and the first group of piezoelectric ceramic particles and the second group of piezoelectric ceramic particles have mutually different compositions. The piezoelectric actuator can thus be manufactured by an application method in a low-temperature environment, and a thicker piezoelectric film can be obtained. In addition, a highly practical piezoelectric film can be provided by combining the advantages of a plurality of material types.