The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Dec. 08, 1999
Akira Nishina, Tokyo, JP;
Tsutomu Kikuchi, Tokyo, JP;
Makoto Tanaka, Tokyo, JP;
Hidetoshi Yoshida, Tokyo, JP;
Tetsuya Kimijima, Tokyo, JP;
Nippon Sanso Corporation, Tokyo, JP;
Abstract
An analyzing apparatus for assaying various kinds of trace impurity contents in various kinds of high-purity gases, having an atmospheric pressure ionization mass spectrometer useful for determination of trace impurity contents in such high-purity gases on the ppb to sub ppb levels and a gas chromatograph integrated therewith, enabling high efficiency determination of trace impurity contents in high-purity gases. The analyzing apparatus having a gas chromatograph ( ) and an atmospheric pressure ionization mass spectrometer ( ), is provided with a system ( ) for introducing a sample gas introduced from a sample gas introduction source directly to the atmospheric pressure ionization mass spectrometer ( ); a system ( ) for introducing the sample gas via the gas chromatograph ( ) to the atmospheric pressure ionization mass spectrometer ( ); and a channel selector ( ) for changing over the channel of the sample gas to either of these two systems.