The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Nov. 19, 1998
Rafael Nathan Kleiman, New York, NY (US);
Megan Lorraine O'Malley, Neshanic Station, NJ (US);
Gregory L. Timp, Pittstown, NJ (US);
Lucent Technologies Inc., Murray Hill, NJ (US);
Abstract
In an imaging system for carrier profiling of a device structure, a doped semiconductor tip is utilized as an active dynamic sensing element for successively probing spaced-apart portions of the structure. At each probe position, the bias voltage applied between the tip and the structure is varied. While the bias voltage is being varied, a measurement is taken of the change in capacitance that occurs between the tip and the structure. These measurements provide an accurate high-resolution high-contrast image that is representative of the carrier profile of the probed portions of the device structure.