The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Oct. 04, 2000
Applicant:
Inventors:
Shigeaki Okawa, Tochigi, JP;
Toshiyuki Ohkoda, Gunma, JP;
Yoshiaki Ohbayashi, Nara, JP;
Mamoru Yasuda, Osaka, JP;
Shinichi Saeki, Osaka, JP;
Shuji Osawa, Osaka, JP;
Assignee:
Sanyo Electric Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/3552 ;
U.S. Cl.
CPC ...
H01L 2/3552 ;
Abstract
A fixed electrode layer is formed on a semiconductor substrate . A vibrating film is formed on the fixed electrode layer through a spacer . Since the vibrating film is a light-permeable film, in order to prevent the malfunction of an electronic circuit formed in the semiconductor substrate by incident light, the region where the electronic circuit is to be formed is covered with a shield metal