The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Jul. 07, 1998
Wiebe B. De Boer, Eindhoven, NL;
Marieke C. Martens, Eindhoven, NL;
Koninklijke Philips Electronics N.V., New York, NY (US);
Abstract
A semiconductor device with a semiconductor body ( ) provided with a memory capacitor ( ) with a lower electrode ( ) consisting of a layer of semiconductor material ( ) having a rough surface ( ) formed by hemispherical grains ( ) of the relevant semiconductor material on which a dielectric layer ( ) and an upper electrode ( ) are provided. The semiconductor material from which the lower electrode is manufactured is Si Ge , wherein 0.2<x<1. The semiconductor device can be manufactured in a simple manner because a layer of Si Ge having a rough surface formed by hemispherical grains of this material can be simply directly formed through deposition by means of usual CVD (Chemical Vapor Deposition) processes.