The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Nov. 05, 1997
Roman Schertler, Wolfurt, AT;
Unakis Balzers Aktiengesellschaft, Balzers, LC;
Abstract
A sputtering station for a disk-shaped workpiece includes one loadlock chamber, one sputtering source with a sputtering surface, a transport chamber with two workpiece handling openings, one communicating with the loadlock chamber and the other with the sputtering source. A transport device in the transport chamber has two workpiece carrier arms extending radially with respect to a rotation axis of the device. Each arm can extend and retract radially and carries a workpiece holder. The two openings of the transport chamber are radially opposite each other with respect to the axis of rotation so that the workpiece holders of the two arms may be swung toward each of the openings and about an arc of 180°.