The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Jun. 21, 2000
Wilmert De Bosscher, Drongen, BE;
Steven August Van Hove, Waregem, BE;
Sinvaco N.V., Zulte, BE;
Abstract
A magnetron including a target ( ) for sputtering onto a substrate in described. The magnetron comprises a magnetic field generator ( ) for generating a closed loop magnetic field adapted to generate a plasma race-track above the target ( ) and a driving device for establishing relative substantially translational movement between the race-track and the target ( ) and adapted to influence the magnetic field generated by the magnetic field generator ( ) at least during part of the relative substantially translational movement, the distance between any point on the race track and the momentarily closest part of the one or more pieces ( ) of ferromagnetic material varying in accordance with the relative substantially translational movement of the race-track and the target ( ).