The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
May. 10, 2000
Applicant:
Inventor:
Michael Liehr, Feldatal, DE;
Assignee:
Leybold Systems GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 3/702 ;
U.S. Cl.
CPC ...
F04B 3/702 ;
Abstract
Method for transporting at least one vaporous substance through the wall ( ) of a vacuum chamber and into the vacuum chamber and device for executing and utilizing the method. In the method, a vaporous substance is introduced from the outside through an interior pipe ( ) of a double-walled pipe into the vacuum chamber, with electric current from a power supply ( ) applied to the interior pipe ( ) and exterior pipe ( ) of the double-walled pipe.