The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Feb. 15, 2000
Applicant:
Inventors:
Shinji Suzuki, Kawasaki, JP;
Yoshiki Mimura, Yokohama, JP;
Assignee:
Ushiodenki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A21B 1/00 ;
U.S. Cl.
CPC ...
A21B 1/00 ;
Abstract
A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps ( ) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines ( ) in a mirror ( ), in which the lamps are mounted, for blowing in air into the vicinity of the lamps ( ), and at least one air exhaust line ( ) for evacuation of air from the vicinity of the lamps ( ).