The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Jan. 23, 2001
Sergei Ostapenko, Wesley Chapel, FL (US);
University of South Florida, Tampa, FL (US);
Abstract
A method of detecting and monitoring elastic strains in a semiconductor wafer ( ) comprising the steps of coupling the wafer ( ) to a transducer ( ) having a periphery ( ). This is followed by operating the transducer ( ) to produce ultrasonic vibrations at a predetermined wavelength &lgr; and propagating a standing wave through the wafer ( ) in response to the ultrasonic vibrations. The method is characterized by extending the wafer ( ) in a cantilevered section L from the periphery ( ) of the transducer ( ) to a distal end ( ), and measuring the amplitude of the standing wave &lgr; in the cantilevered section L. For maximum efficiency, the cantilevered section L is substantially one quarter of the predetermined wavelength (&lgr;/4).