The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Jul. 25, 2000
Mark C. Johnson, Phoenix, AZ (US);
Michael R. McNamee, Mesa, AZ (US);
Jason L. Addink, Phoenix, AZ (US);
Phoenix Analysis and Design Technologies, Inc., Gilbert, AZ (US);
Abstract
The present invention provides a very compact, lightweight, turbomolecular pump for evacuating a chamber at volumetric flowrates of less than 10 liters per second. In one embodiment a turbomolecular pump is provided having a bladed rotor disposed within a housing, and mounted for rotation at one end on a passive magnetic main bearing and at the other end on a ball bearing. The pump is configured such that the magnetic bearing carries a majority of the rotor unbalance load. The rotor may be beneficially tapered from a larger diameter at the high vacuum end to a smaller diameter at the low vacuum end. The invention also provides a method of machining the blades of the rotor from a rotor blank using a single point tool in a two-step numerical control lathe operation. In another method of the invention, the rotor blades are individually cut using a high speed circular slitting saw by plunging the saw radially into the rotor blank.