The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Jan. 04, 1999
Applicant:
Inventors:
Brent Alan Anderson, Jericho, VT (US);
Michael Coffey, Essex Junction, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/748 ; G03B 2/742 ; G03B 2/750 ;
U.S. Cl.
CPC ...
G03B 2/748 ; G03B 2/742 ; G03B 2/750 ;
Abstract
A method and rotational mask scanning apparatus for exposing a plurality of images on a workpiece, include a rotatable mask having a pattern of image segments thereon, an optical system for projecting the image segments onto the workpiece, and a device for at least one of rotating the mask and for moving the workpiece so as to continuously expose a plurality of regions on the workpiece with the pattern of image segments.