The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2002

Filed:

Feb. 09, 2000
Applicant:
Inventor:

Yoshiyuki Ishikura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/726 ;
U.S. Cl.
CPC ...
G01R 2/726 ;
Abstract

This invention includes a first electrode ( a, b, c, ) and a second electrode ( a, b, c, d) which are arranged to face each other so as not to come into contact with each other and a gap between which changes in accordance with a change in an amount to be detected, and a signal processor for calculating the amount to be detected on the basis of an electrostatic capacitance formed between the first and second electrodes. The first electrode has a portion ( a, a) and a portion ( b, b), areas of which that face the second electrode increases and decreases, respectively, upon a positioning error that occurs in a direction (x, y) parallel to the first electrode. These portions have the same area.


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