The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Nov. 14, 2000
Applicant:
Inventors:
Thomas Stephen Villani, Londonderry, NH (US);
Lawrence A. Goodman, Plainsboro, NJ (US);
Assignee:
Sarnoff Corporation, Princeton, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 1/800 ;
U.S. Cl.
CPC ...
G01D 1/800 ;
Abstract
A method of adjusting the position of a micro-mechanical bi-material cantilever is provided. The bi-material includes a first and a second material and each material has a corresponding thermal expansion coefficient. The method includes implanting ions predominantly into one material of the bi-material to modify internal stress in one of the first and second materials relative to the other material. The deformation of the bi-material is then detected to modulate the implantation of ions thereto.