The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
May. 20, 1999
Calvin Todd Gabriel, Cupertino, CA (US);
Philips Semiconductors, New York, NY (US);
Abstract
A system and apparatus is provided for preventing damage to gate oxide due to ultraviolet radiation associated with semiconductor processes. Included is a substrate and a gate formed on the substrate. The gate includes a gate material layer and a gate oxide layer stacked on the substrate. A pair of spacers are situated on opposite sides of the gate. Deposited over the gate and the spacers is an ultraviolet radiation blocking material for preventing the ultraviolet radiation from damaging the gate oxide layer of the gate. Finally, at least one metal and intermetal oxide layer is positioned over the ultraviolet radiation blocking material. In an alternate embodiment, instead of the ultraviolet radiation blocking material being deposited over the gate and the spacers, the spacers are constructed from an ultraviolet radiation blocking material for preventing the ultraviolet radiation from damaging the gate oxide layer of the gate.