The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Nov. 30, 2000
Kazuhiko Sato, Suwa, JP;
Hiroyuki Maruyama, Suwa, JP;
Masahiro Fujii, Suwa, JP;
Tadaaki Hagata, Suwa, JP;
Koji Kitahara, Suwa, JP;
Keiichi Mukaiyama, Suwa, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
Methods for manufacturing an electrostatic actuator that comprises electrode members having opposing surfaces with a gap disposed therebetween. In an ink jet head, a bottom surface of a diaphragm may be one of the electrodes (common electrode) of an eletrostatic actuator, the diaphragm forming a wall of an ink chamber in the ink jet head that is displaced relatively by an electrostatic force. A hydrophobic film, preferably hexamethyldisilazane (HMDS), is formed on at least one of the opposing electrode surfaces to improve the durability of the electrostatic actuator so that electrostatic attraction between opposing electrode members does not decrease and the opposing electrode members do not stick together. HMDS molecules are smaller than PFDA molecules, and a uniform, variation-free hydrophobic film can therefore be formed even when the gap between opposing electrodes is narrow. Durability and film stability of a HMDS hydrophobic film are also high. An electrostatic actuator with high durability and operating stability can thus be achieved.