The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Jun. 01, 2000
Applicant:
Inventors:
Assignee:
Korea Research Institute of Chemical Technology, Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B 2/500 ; C30B 2/916 ; C23C 1/618 ;
U.S. Cl.
CPC ...
C30B 2/500 ; C30B 2/916 ; C23C 1/618 ;
Abstract
An organometallic compound of formula LiOR′.(R′O)MR is vaporized at a low temperature and employed in a CVD process of a heterometallic oxide film of the LiMO type, wherein M is a Group 13 element such as Al or Ga; R is a C alkyl group; and R′ is a C alkyl group.