The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2002

Filed:

Jul. 05, 2000
Applicant:
Inventors:

Armin Blecker, Asslar, DE;

Wolfgang Eberl, Solms, DE;

Heinrich Lotz, Wetzlar, DE;

Heinz Reichhart, Asslar-Berghausen, DE;

Assignee:

Pfeiffer Vacuum GmbH, Asslar, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 2/308 ; F04B 2/314 ; F04B 1/700 ; F04B 3/00 ;
U.S. Cl.
CPC ...
F04B 2/308 ; F04B 2/314 ; F04B 1/700 ; F04B 3/00 ;
Abstract

A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions and providing for gas flow from the discharge regions into a common discharge region of the two gas friction pumps, and a multi-stage pump located downstream of both gas friction pumps for compressing the gas flowing through the multi-state pump and having a suction region and a discharge region connected with the discharge region of the vacuum pump, with gas flowing into the suction region from the common discharge region of the two gas friction pumps.


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