The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Mar. 01, 2000
Mike Binnard, Belmont, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Corporation, , JP;
Abstract
A suspension system ( ) for suspending a stage ( ) spaced apart from a stage base ( ) is provided herein. The suspension system ( ) includes a plurality of spaced apart suspension assemblies ( ). Each suspension assembly ( ) includes a fluid pad ( ) and an adaptable section ( ). A bearing fluid ( ) is directed from the fluid pad ( ) to create a fluid bearing ( ) between the fluid pad ( ) and the stage base ( ). The fluid bearing ( ) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section ( ) secures the fluid pad ( ) to the stage ( ). The adaptable section ( ) allows for relative movement between the fluid pad ( ) and the stage ( ). More specifically, the adaptable section ( ) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system ( ) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.