The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Jul. 29, 1999
Tomonori Okudaira, Hyogo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A semiconductor device preventing contact between a capacitor insulator and a plug material even when an upper surface of the plug is exposed by misregistration in lithography and manufacturing method thereof are obtained. The semiconductor device includes an interlayer insulating film, a conducting plug, a capacitor lower electrode and a capacitor dielectric, and an end portion of the upper surface of the conducting plug has a portion overlapping a vicinity of an outer periphery of the upper surface of the capacitor lower electrode when viewed two-dimensionally. In the vicinity of the end portion of the upper surface of the conducting plug, a chemically inactive member is formed.