The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Mar. 30, 2001
Corey M. Dunsky, Portland, OR (US);
Ho W. Lo, Portland, OR (US);
Ken Whiteman, Aloha, OR (US);
Donald R. Wilt, Lexington, MA (US);
Spencer Barrett, Beaverton, OR (US);
Raman Sudhakar, Beaverton, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
A single pass actuator ( ), such as a deformable mirror ( ), quickly changes, preferably in less than 1 ms, the focus and hence the spot size of ultraviolet or visible wavelength laser pulses to change the fluence of the laser output ( ) at the workpiece surface between at least two different fluence levels to facilitate processing top metallic layers ( ) at higher fluences and underlying dielectric layers ( ) at lower fluences to protect bottom metallic layers ( ). The focus change is accomplished without requiring Z-axis movement of the laser positioning system ( ). In addition, the spot size can be changed advantageously during trepanning operations to decrease via taper, reduce lip formation, increase throughput, and/or minimize damage.