The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Dec. 12, 2000
Applicant:
Inventors:
Hye-Young Kim, Taejon, KR;
Soon-Ku Huh, Kyoungsangbuk-do, KR;
Assignee:
LG. Philips LCD Co., Ltd., Seoul, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ;
U.S. Cl.
CPC ...
H01L 2/120 ;
Abstract
A method of manufacturing a thin film transistor array substrate that includes photolithographically forming an active layer on a substrate. The photoresist mask remaining on the substrate is then removed using a stripper. After stripping, the substrate is immersed in a thin alkali-based solution. The array substrate is then cleaned using distilled water. Source and drain electrodes are then formed on the active layer.