The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Aug. 15, 2001
Applicant:
Inventors:
Shawn M. O'Rourke, Tempe, AZ (US);
Ravichandran Subrahmanyan, Lake Oswego, OR (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Abstract
A vacuum microelectronic device ( ) is formed by applying a first conductor ( ) to a substrate ( ) and utilizing the first conductor ( ) to expose a dielectric material ( ) and a second conductive material ( ) from a back surface of the substrate ( ). A second conductor ( ) and a dielectric ( ) are formed from the second conductive material ( ) and the dielectric material ( ), respectively. This method self-aligns the dielectric ( ) and the second conductor ( ) with the first conductor ( ). Electron emitters ( ) of the vacuum microelectronic device ( ) are formed on the first conductor ( ).