The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2002
Filed:
Oct. 19, 1999
Victoria Ann Edwards, Horseheads, NY (US);
Bernard Eid, Corning, NY (US);
Christopher Philip Brophy, Corning, NY (US);
Darol Chamberlain, Ithaca, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 &mgr;m wide and 2 &mgr;m thick, resulting in shorter actuation distances of approximately 15 &mgr;m. This feature results in an optical switch having faster switching times.