The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2002
Filed:
Jun. 23, 1999
Applicant:
Inventors:
Dustin A. Woodbury, Indian Harbour Beach, FL (US);
Joseph A. Czagas, Palm Bay, FL (US);
Assignee:
Harris Corporation, Melbourne, FL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ; H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/14763 ; H01L 2/144 ;
Abstract
A semiconductor device or integrated circuit has high and low resistive contacts. Mobility spoiling species such as carbon or oxygen are implanted into all contacts. The high resistive contacts are covered with a barrier metal to protect silicide from chemical interaction with the interconnect metalization (aluminum) in the low-resistance contacts. Selective silicide formation converts some of the contacts back to low-resistance contacts.